| 摘要 |
PROBLEM TO BE SOLVED: To solve such the problem that since a tilt image includes various contours of a three-dimensional pattern and also includes an edge due to a shape change out of measured objects because of roughness of a pattern surface etc., shape recognition is too complicated to easily perform shape measurement through image processing, and it is difficult to determine an observation direction suitable for shape evaluation of the pattern. SOLUTION: The predicted position (predicted contour) of the contour of a pattern on a captured image is estimated from the imaging direction of the pattern to be evaluated and design data of a circuit pattern included in an imaging region, the predicted range of a positional shift of the predicted contour from an actual contour is set, and an image processing range or image processing method is set on the basis of the predicted range of the positional shift to calculate the size, contour, image featured value, and three-dimensional shape of the pattern. COPYRIGHT: (C)2011,JPO&INPIT |
