| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying device capable of suppressing deterioration in carrying precision even if a carrying speed is increased. SOLUTION: The carrying device includes: a carrying arm 16 configured to expand and contract, and swivel; a pick 17 provided on a top of the carrying arm 16, and mounted with a carrier W; an electrostatic adsorption mechanism 30 including an internal electrode 31 provided in the pick 17, and electrostatically adsorbing the carrier W to the pick 17; a gas discharge mechanism 40 including a gas flow passage 41 formed in the pick 17, and discharging gas to an adsorption surface 42 of the formed W for the pick 17; and a control unit 50 controlling the electrostatic adsorption mechanism 30 and the gas discharge mechanism 40 to cancel the electrostatic adsorption by the electrostatic adsorption mechanism 30, and then carrying out an electrostatic discharge sequence for the carrier W and the pick 17 and the discharge of the gas to the adsorption surface 42 in parallel. COPYRIGHT: (C)2011,JPO&INPIT |
