| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus capable of inspecting the optical performance of a lens to be inspected although the inspection apparatus is of a small type. SOLUTION: The inspection apparatus 20 includes a projection optical system 21 for projecting an image of a light source (opening 3a of a light shielding plate 3) which is a point light source or a line light source on a focal plane of a lens 30 to be inspected, a rotating mirror 7 which reflects the light from an image of a light source penetrating through the lens 30 to be inspected and forming an image again at substantially the same position as the image of the light source on the focal plane by the lens 30 to be inspected, and a relay optical system 22 for relaying the image of the light source whose image is formed again by the lens 30 to be inspected on an image sensor 9. COPYRIGHT: (C)2011,JPO&INPIT
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