| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a test specimen for atom probe analysis to simply manufacture a test specimen for analyzing an analyzed domain by means of an atom probe, the analyzed domain comprising a conductor portion formed on an insulating substrate. SOLUTION: The method has processes of: forming a protective film 4 in a test portion in an analyzed domain of a specimen material 1; projecting an ion beam to the specimen material with the protective film formed thereon to remove at least a part of the insulating substrate 2 beneath the analyzed domain 3a which is the test portion, thereby exposing at least a part of the bottom of the analyzed domain; embedding a conductive metal in a portion with the insulating substrate removed therefrom in the above process so that the metal contacts with the bottom of the analyzed domain; cutting out a specimen piece by projecting an ion beam to the specimen material so that the conductive metal embedded in the above process is in the bottom; and a picking up the cut-out specimen piece to fix the conductive metal side thereof to a specimen base, thus working the side with the analyzed domain formed thereon, into a needle shape. COPYRIGHT: (C)2011,JPO&INPIT
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