| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump capable of preventing a ground fault interrupter at an apparatus side from being operated while preventing an increase in the size of a power source unit. SOLUTION: In the turbo-molecular pump including a pump unit including a rotor having a rotary blade and performing high-speed rotation, a power source unit for driving and controlling the pump unit, and a heater 41 for heating the pump unit, the electrical leakage of the heater 41 is detected based on a difference between a current supplied from an external power source 60 to the heater 41 and a current returned from the heater 41 to the external power source 60. When the difference becomes equal to or larger than an energization stop determination value, energization to the heater 41 is stopped by opening a relay 54 provided on a power line for supplying power from the external power source 60 to the heater 41. When it is determined that the detected leakage is true leakage, the open state of the relay 54 is maintained, and when it is determined to be false leakage, energization to the heater is conducted by closing the relay 54 again. COPYRIGHT: (C)2011,JPO&INPIT
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