| 摘要 |
PROBLEM TO BE SOLVED: To provide a high frequency power supply line, along with a method of manufacturing the same, capable of achieving accuracy of positioning at an inner cylinder part to an outer cylinder part and with a superb yield ratio of moldability. SOLUTION: The high frequency power supply line 1 is provided with a double-cylinder conductor 2 consisting of an inner cylinder part 2a, and a concentric outer cylinder part 2b integrally coupled with the inner cylinder part 2a by four coupling parts 2c over a whole length in a length direction. The four coupling parts 2c are arranged at a given interval in a radial direction. By providing the four coupling parts 2c between the inner cylinder part 2a and the outer cylinder part 2b, positioning accuracy of the inner cylinder part 2a can be enhanced as compared with a conventional high frequency power supply line 100 which has only one coupling part 200c between an inner cylinder part 200a and an outer cylinder part 200b, thereby high-frequency resistance can be lowered. COPYRIGHT: (C)2011,JPO&INPIT |
