| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor laser integrated element capable of highly accurately aligning the optical axes of a plurality of semiconductor laser structures having different output wavelengths, and to provide a method for manufacturing the element. SOLUTION: The semiconductor laser integrated element 1 includes a gallium nitride-based semiconductor substrate 11 having a main surface 11a and a rear surface 11b, an optical resonator 10 provided on the main surface 11a and having a pair of resonant end surfaces 10a, 10b, and an optical resonator 50 provided on the rear surface 11b and having a pair of resonant end surfaces 50a, 50b. An angle formed by the main surface 11a and the rear surface 11b, and a c-plane of the gallium nitride-based semiconductor crystal is≥45°and≤135°, and the optical resonator 10 has an active layer 17 containing indium and epitaxially grown on the main surface 11a, and the optical resonator 50 has an active layer 57 containing indium and epitaxially grown on the rear surface 11b. The active layers 17, 57 are different in the peak wavelength of a light emitting wavelength. COPYRIGHT: (C)2011,JPO&INPIT
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