| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide radiation sensitive resin composition, giving a resin film having excellent contactness to various kinds of materials, high heat resistance, ITO electrode processability, and excellent pattern processability. <P>SOLUTION: This radiation sensitive resin composition includes: (A) cyclic olefin polymer having protic polar group; (B) a cross linking agent; (C) a radiation sensitive compound; (D) a thiol compound expressed by the following general formula (1); and (E) a compound containing carboxyl group. In the general formula (1), X<SP>1</SP>-X<SP>3</SP>are respectively independently -SH, -SR, -NR'R" or -SM(R, R' and R" are respectively independently 1-5C straight chain or branch alkyl group, and M is alkali metal), and at least one of these is -SH. <P>COPYRIGHT: (C)2011,JPO&INPIT |
