发明名称 WAFER BACK SIDE GRINDING PROCESS
摘要 A wafer back side grinding process. A workpiece comprising a first assembly having a first semiconductor wafer and a second assembly having a second semiconductor wafer is provided. A first back side of the first semiconductor wafer is grinded by using the second assembly as a carrier. Thereafter, a second back side of the second semiconductor wafer is grinded.
申请公布号 US2011086580(A1) 申请公布日期 2011.04.14
申请号 US20090577712 申请日期 2009.10.12
申请人 CHEN JEN-CHUNG 发明人 CHEN JEN-CHUNG
分类号 B24B1/00;B24B7/20;B24B37/04 主分类号 B24B1/00
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