发明名称 OPTICAL APPARATUS WITH ADJUSTABLE ACTION OF FORCE ON AN OPTICAL MODULE
摘要 The disclosure pertains to an optical apparatus, in particular for microlithography, that includes an optical module, a support structure and a connection apparatus. The connection apparatus includes at least one connection unit which includes a first connector part and a second connector part. The first connector part is connected to the optical module, and the second connector part is connected to the support structure.
申请公布号 US2011085239(A1) 申请公布日期 2011.04.14
申请号 US20100963317 申请日期 2010.12.08
申请人 CARL ZEISS SMT GMBH 发明人 KWAN YIM-BUN PATRICK
分类号 G02B7/00 主分类号 G02B7/00
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