A CORRECTION METHOD FOR ERROR OF RIGHT ANGLE USING LEAST SQUARE METHOD

摘要

PURPOSE: A squareness error correction method using a least square method is provided to ensure precise measurement by estimating and correcting the squareness error factor of a transfer axis. CONSTITUTION: A squareness error correction method using a least square method is as follows. A plurality of measurements(Pi), which are distorted by the squareness error between the Z axis of the measuring point(200) and the X axis of a target(100) of a measuring unit, are obtained at a plurality of spots. The squareness error is estimated based on the measurements and information on a plurality of positions corresponding to each measurement, using the least square method.