发明名称 |
SEMICONDUCTOR DEVICE HAVING SILICON ON STRESSED LINER(SOL) |
摘要 |
<p>PURPOSE: A semiconductor device having silicon on a stress liner is provided to improve the performance of the semiconductor device by including the stress liner. CONSTITUTION: A semiconductor substrate with an embedded disposable layer is prepared. A part of the disposable layer is removed to form a void on the substrate. Materials accumulate in the void to form a stress liner on the substrate. A transistor is formed on the external semiconductor layer. A transistor is separated from the stress layer. Silicide is added to the end of the stress liner for forming an end cap(60).</p> |
申请公布号 |
KR20110038594(A) |
申请公布日期 |
2011.04.14 |
申请号 |
KR20100098494 |
申请日期 |
2010.10.08 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LIN CHUNG HSUN;CHANG JOSEPHINE B.;BEDELL STEPHEN W. |
分类号 |
H01L21/336;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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