发明名称 SEMICONDUCTOR DEVICE HAVING SILICON ON STRESSED LINER(SOL)
摘要 <p>PURPOSE: A semiconductor device having silicon on a stress liner is provided to improve the performance of the semiconductor device by including the stress liner. CONSTITUTION: A semiconductor substrate with an embedded disposable layer is prepared. A part of the disposable layer is removed to form a void on the substrate. Materials accumulate in the void to form a stress liner on the substrate. A transistor is formed on the external semiconductor layer. A transistor is separated from the stress layer. Silicide is added to the end of the stress liner for forming an end cap(60).</p>
申请公布号 KR20110038594(A) 申请公布日期 2011.04.14
申请号 KR20100098494 申请日期 2010.10.08
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 LIN CHUNG HSUN;CHANG JOSEPHINE B.;BEDELL STEPHEN W.
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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