,申请号JP20100538311-传众专利搜索

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发明名称
摘要
申请公布号	JP2011512020(A)	申请公布日期	2011.04.14
申请号	JP20100538311	申请日期	2007.12.20
申请人		发明人
分类号	H01L21/02;C23C14/56;H01L21/67	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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