| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To readily and inexpensively manufacture a solar cell having high light confinement effect. <P>SOLUTION: The solar cell is manufactured by a step for forming a backplate electrode layer (2) on a substrate (1); a step for forming a photoelectric conversion layer (3) on the back electrode layer (2); a step for forming a pattern film having a plurality of openings (5) on an upper face of the photoelectric conversion layer (3); a step for performing anisotropic etching via the pattern film, and forming a lengthwise first hole (5a) in the photoelectric conversion layer (3) below the opening (5); a step for performing anisotropic etching via the pattern film after the first hole (5a) is formed and forming a second hole (5b), having a bent side whose maximum width is larger than the opening width of the first hole (5a) below the first hole (5a); and a step for removing the pattern film, forming a transparent conductive coating film (4) on the photoelectric conversion layer (3) and embedding the first and second holes by the transparent conductive coating film. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
