| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid holding device (a static pressure bearing and a static pressure guide) capable of restraining accuracy reduction in a moving body by a disturbance load varying at a high speed. SOLUTION: This fluid holding device includes displacement sensors 9 and 10 for measuring relative displacement by disturbance force of a main spindle 3 and bearings 4 and 5, and land pressure oil supply-suction means 7 and 8 for supplying-sucking pressure oil of a land part of a static pressure pocket, and restrains the accuracy reduction in the fluid holding device by the disturbance force by supplying pressure oil to the land part or sucking the pressure oil of the land part so as to restrain the relative displacement of the bearings 4 and 5 and the main spindle 3 by the disturbance force. COPYRIGHT: (C)2011,JPO&INPIT |
