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发明名称
PLASMA PROCESSING DEVICE AND METHOD FOR MONITORING STATE OF DISCHARGE IN PLASMA PROCESSING DEVICE
摘要
申请公布号
KR20110038650(A)
申请公布日期
2011.04.14
申请号
KR20107029764
申请日期
2009.06.29
申请人
PANASONIC CORPORATION
发明人
NONOMURA MASARU
分类号
H05H1/46;H01L21/304;H01L21/3065
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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