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发明名称
METHOD AND APPARATUS FOR ELECTROSTATIC FIXING OF SUBSTRATES WITH MOLECULES WHICH CAN BE POLARIZED
摘要
申请公布号
EP1905071(B1)
申请公布日期
2011.04.13
申请号
EP20070723509
申请日期
2007.03.22
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
LANDESBERGER, CHRISTOF
分类号
H01L21/683
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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