发明名称 |
ELECTROSTATIC CHARGE CONTROLLING PROCESS FOR PIEZOELECTRIC OXIDE SINGLE CRYSTAL |
摘要 |
<p>To provide a processing method which can restrain the charging of lithium tantalate single crystal or lithium niobate single crystal without impairing the piezoelectricity. Moreover, to provide a processing apparatus which can carry out the processing method simply and easily. It is characterized in that a wafer 50, made from a lithium tantalate single crystal or a lithium niobate single crystal, and a reducing agent 60, including an alkali metal compound, are accommodated in a processing tank 2, and the inside of the processing tank 2 is held at a temperature of from 200 °C to 1000 °C under decompression, thereby reducing the wafer 50.</p> |
申请公布号 |
EP1741809(B1) |
申请公布日期 |
2011.04.13 |
申请号 |
EP20050738929 |
申请日期 |
2005.04.27 |
申请人 |
YAMAJU CERAMICS CO., LTD. |
发明人 |
HOTTA, KAZUTOSHI;KANNO, KAZUYA;MIYAGAWA, DAISAKU;KURACHI, MASATO;SASAMATA, TAKEJI;SAHASHI, IETAKA |
分类号 |
C30B29/30;C01G31/02;C30B33/00;C30B33/02 |
主分类号 |
C30B29/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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