SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM

摘要

PURPOSE: A substrate processing device, a substrate processing method, and a storage medium are provided to rapidly process a substrate by processing the substrate with priority. CONSTITUTION: A substrate carrying block includes a container arranging unit and a container transferring unit. A process block(14a,14b) includes a plurality process units(2) and a substrate transfer unit. A plurality of processing units process the substrate transferred from the substrate carrying block. A controller(5) outputs a control signal to process the substrate with priority when the substrate with the priority is transferred to the container arranging unit.