| 摘要 |
PURPOSE: A vibration sensing system of a motor and a method of constituting database using the same are provided to prevent the operating stop of a system due to the failure of the motor since the vibration state and the operation state of the motor in a semiconductor unit are represented and thus the failure of the motor is sensed previously. CONSTITUTION: A vibration sensing system of a motor comprises a vibration sensor(10), an A/D converter, a micro controller(30), a main computer, a data storage unit(42) and a display unit(50). The vibration sensor senses the vibration of the motor in semiconductor equipment. The A/D converter changes analog output from the vibration sensor into a digital value. The micro controller receives and controls the output of the A/D converter. The main computer receives, calculates, classifies and arranges the output of the micro controller. The data storage unit re-classifies the classified data, stores and outputs it as a text file.
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