发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THEREOF
摘要 <p>PURPOSE: A semiconductor device and a method for fabricating thereof are provided to maximize the coupling ratio between a control gate and the capacitance between tunneling regions by forming the floating gate of a trench type. CONSTITUTION: In a semiconductor device and a method for fabricating thereof, an element isolation film(130) defines a first well region(110) and an active area including a second well region(120). An insulating layer(140) is formed on the inside of a trench which is formed in the first and second well region. A floating gate(150) is formed on the insulating layer. Source/drain regions(160,170) are formed on one side of the first well region. A bulk region(180) is formed on the other side of the first well region.</p>
申请公布号 KR20110037673(A) 申请公布日期 2011.04.13
申请号 KR20090095210 申请日期 2009.10.07
申请人 DONGBU HITEK CO., LTD. 发明人 LEE, CHANG HUN
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
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