| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet stretcher which can stably and surely expand a sheet by an inexpensive and compact driving mechanism. SOLUTION: The sheet stretcher, which is used for a chip pickup device and expands a wafer sheet 10 held by a wafer ring 9, is provided with a holding plate elevating mechanism to lower a holding plate 7 holding the wafer ring 9, which is vertically moved against a base member by an air cylinder 15 for elevating the holding plate 7, a stopper member 17 that functions as a speed regulating member for regulating the lowering speed when the holding plate 7 is lowered, and a speed adjusting means that adjusts the lowering speed of the stopper member 17 to the base member by lowering the stopper member 17 to the base member by means of a numerically-controllable motor. Thus, an air cylinder having a large driving force is used to precisely control the lowering speed of the holding plate 7. COPYRIGHT: (C)2009,JPO&INPIT |
