| 摘要 |
<p>PURPOSE: A device and method for processing a substrate are provided to reduce the processing time for a substrate by simultaneously loading and unloading the substrate. CONSTITUTION: A device for processing a substrate comprises a substrate loading part(210), a horizontal conveying member(200), a vertical conveying member(300), and a lower side conveying member(400). The substrate loading part receives substrates from the outside. The horizontal conveying member transfers the substrate loading part in a horizontal direction. The substrate includes a driving part located at the side of a substrate return line. The vertical conveying member ascends and descends the substrate from the horizontal conveying member. The lower side conveying member receives the substrate from the vertical conveying member and transfers the substrate to a substrate processing part(500).</p> |
