DIE BONDING APPARATUS OF SEMICONDUCTOR

摘要

PURPOSE: A die bonding apparatus of a semiconductor is provided to increase the productivity by including two bonding heads for die-bonding semiconductor chips in one substrate alternately to reduce a cycle time. CONSTITUTION: In a die bonding apparatus of a semiconductor, a first bonding head(11) transfers a first semiconductor chip(1) along a transfer path to a bonding point on a substrate. A first transfer unit(13) moves the first bonding head and a second bonding head(12) transfers a second semiconductor chip to the bonding point along the transfer path. A second transfer unit(14) moves a second bonding head. A controller(15) applies a transfer signal and a return signal to the first and second transfer unit.