| 摘要 |
PURPOSE: A member for substrate processing apparatus and a method for manufactruing the same, and a substrate processing apparatus are provided to improve the corrosiveness and the durability by forming the anode oxide layer and the ceramic layer sequentially on the surface of the substrate processing apparatus member. CONSTITUTION: A body of the member for the substrate processing apparatus is prepared(S100). An anode oxide layer is formed on the surface of the body through the anodic oxidation process(S110). A ceramic membrane is formed on the surface of the body on which the anodized film is formed through the vacuum deposition process(S120). The body is loaded into the inner side of a vacuum deposition apparatus.
|
