,申请号JP19970303464-传众专利搜索

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发明名称
摘要
申请公布号	JP4668364(B2)	申请公布日期	2011.04.13
申请号	JP19970303464	申请日期	1997.10.16
申请人		发明人
分类号	C23C16/50;H05H1/46;C08L59/00;C08L77/00;C08L79/08;C08L101/12;C23F4/00;H01L21/205;H01L21/31	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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