ACRYLIC MONOMER, POLYMER AND CHEMICALLY AMPLICATION PHOTORESIST COMPOSITION

摘要

PURPOSE: An acrylic monomer is provided to ensure little substrate dependence and excellent transparency, contrast, sensitivity, resolution, and development. CONSTITUTION: An acrylic monomer has a t-butoxycarbonyl group at the end thereof. The acrylic monomer is represented by chemical formula (I), wherein R6 is hydrogen or methyl group. A polymer is formed by polymerizing the acrylic monomer having a t-butoxycarbonyl group at the end thereof.