| 摘要 |
PURPOSE: A work conveying cart, a work processing system, a gas supply system, and a gas supply system, and a gas supply method are provided to remove a gas source of high pressure since gas is frequently supplied to a buffer tank through a coupler. CONSTITUTION: Equipment consumes gas. Gas is supplied to a buffer tank through a flow path(65). The buffer tank stores the gas. A coupler(67) is installed in the flow path. A regulator(66) is located between the equipment and the buffer tank.
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