HEATING PLATE COMBINING METHOD FOR QUARTZ HEATER OF SEMICONDUCTOR PROCESSING EQUIPMENT, AND FABRICATION METHOD OF QUARTZ HEATER, AND QUARTZ HEATER FABRICATED BY THIS METHOD

摘要

PURPOSE: A method for manufacturing a heater plate of a quartz heater for semiconductor processing equipment, a method for manufacturing the quartz heater and the quartz heater manufactured by the same are provided to prevent a heater plate from becoming damaged due to thermal expansion by vacuumizing the inside of the heater plate with a hot wire. CONSTITUTION: A heater plate is comprised of an upper plate(111) and a lower plate(112). A hot wire is formed between the upper plate and the lower plate. A hot wire insertion groove(112a) and a welding groove are formed on one side of the lower plate. A connection tube is combined with the other side of the lower plate with a quartz welding. The hot wire is processed to be inserted into the hot wire insertion groove of the lower plate.