发明名称 |
Heating crucible and deposition apparatus including the same |
摘要 |
A heating crucible and a deposition apparatus are provided that have a uniform deposition rate and good reproducibility. The heating crucible of the deposition apparatus includes a titanium body with an internal cavity to contain a material to be deposited and an opening to emit the material to be deposited, a wire to heat the body, and an insulator to insulate the body from the wire.
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申请公布号 |
US7922820(B2) |
申请公布日期 |
2011.04.12 |
申请号 |
US20050266397 |
申请日期 |
2005.11.04 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
RYU SEOUNG-YOON;YU KYONG-TAC;MA SUNG-RAG |
分类号 |
H01L21/00;C23C14/00;C23C16/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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