发明名称 Package and packaging assembly of microelectromechanical system microphone
摘要 A package of a MEMS microphone is suitable for being mounted on a printed circuit board. The package includes a substrate, at least one MEMS microphone, and a conductive sealing element. The MEMS microphone is arranged on the substrate, and electrically connected to a conductive layer on a bottom surface of the substrate. The conductive sealing element is arranged on the substrate and around the MEMS microphone for connecting the printed circuit board, and constructs an acoustic housing with the printed circuit board and the substrate. The acoustic housing has at least one acoustic hole passing through the substrate. The acoustic hole has a metal layer on the inner wall thereof for connecting the conductive layer on the bottom surface of the substrate to another conductive layer on the top surface of the substrate.
申请公布号 US7923791(B2) 申请公布日期 2011.04.12
申请号 US20070871147 申请日期 2007.10.11
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 HUANG CHAO-TA;CHIEN HSIN-TANG
分类号 H01L29/84 主分类号 H01L29/84
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