发明名称 |
Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space |
摘要 |
An outer dust collecting filter covers a casing an intake port and an outer fan flows air from an external environment into the casing via the outer dust collecting filter. A clean chamber has an intake port within the casing, an inner dust collecting filter for covering the intake port, and an inner fan for flowing the air within the casing. A control unit controls fan rotating speeds so that a measured pressure within the casing becomes higher at a set value than a measured pressure in the external environment, and a measured pressure within the clean chamber becomes higher at a set value than the measured pressure within the casing.
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申请公布号 |
US7925390(B2) |
申请公布日期 |
2011.04.12 |
申请号 |
US20070882063 |
申请日期 |
2007.07.30 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
JINGU TAKAHIRO;MIYAZAKI YUSUKE;ZAMA KAZUHIRO |
分类号 |
B01L1/04;G05D16/00 |
主分类号 |
B01L1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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