| 摘要 |
An exposure mask is constituted of hole-patterns whose scales are higher than the limit resolution of exposure light and which are repetitively aligned in X-Y directions with the prescribed pitch (ranging from 140 nm to 180 nm) therebetween, halftone phase shift regions whose transmission factors range from 2% to 20% and each of which is aligned between two hole-patterns adjacently lying in the X-direction or the Y-direction so as to apply an inverse phase to incidence light, and light preventive regions each of which is aligned between two hole-patterns adjacently lying in an oblique direction inclined to the X-direction or Y-direction by 45°. The exposure mask is illuminated with azimuthal polarization light which is produced by a secondary light source of a zonal illumination and whose polarization direction is perpendicular to the radial direction of the secondary light source.
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