发明名称 Semiconductor device with fuse and method for fabricating the same
摘要 A method for fabricating a semiconductor with a fuse includes providing a substrate, forming an insulation layer over the substrate, forming a polysilicon hard mask over the insulation layer, forming a first mask pattern to form a fuse over the polysilicon hard mask, and removing the polysilicon hard mask exposed by the first mask pattern to form a portion of the polysilicon hard mask into a polysilicon fuse.
申请公布号 US7923307(B2) 申请公布日期 2011.04.12
申请号 US20080163383 申请日期 2008.06.27
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM BUEM-SUCK
分类号 H01L23/62 主分类号 H01L23/62
代理机构 代理人
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