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发明名称
GLASS-MODIFIED STRESS WAVES FOR SEPARATION OF ULTRA THIN FILMS AND NANOELECTRONICS DEVICE FABRICATION
摘要
申请公布号
KR101026956(B1)
申请公布日期
2011.04.11
申请号
KR20067017492
申请日期
2005.03.07
申请人
发明人
分类号
G01L1/24;B82Y15/00;B82Y35/00
主分类号
G01L1/24
代理机构
代理人
主权项
地址
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