METHOD OF FABRICATING TUNGSTEN CFE USED IN A MICROCOLUMN FOR AN INSPECTION IN THE ELECTRIC AND ELECTRON DEVICES

摘要

PURPOSE: A method for manufacturing a micro electronic column tungsten CFE(Cold Field Emitter) is provided to improve the durability by stably emitting electrons. CONSTITUTION: A regular length of a tungsten wire is inserted into a KOH solution. An electrochemical etch is operated. An Nd:YAG laser(200) is projected to one end of the tungsten wire. A tungsten wire(310) is rotated about the central axis. The tungsten wire is moved in parallel with the central axis(C).