发明名称 DEVICE FOR FORMATION OF NANOELECTRONIC STRUCTURES
摘要 A device for formation of nanoelectronic structures comprises a laser system unit optically connected via a unit of fiber-optic point, a sample and a diaphragm with a photoreceiver, output of which is connected to input of fiber-optic point unit, input and output of which are connected to corresponding input and output of a mode selection unit, second input-output of which is connected to input-output of the photoreceiver, third input is being input of the device. A device comprises laser control unit, input-output of which is connected to fourth input-output of the mode selection unit. Second input-output is connected to input-output of the laser system unit.
申请公布号 UA58422(U) 申请公布日期 2011.04.11
申请号 UA20100011657U 申请日期 2010.09.30
申请人 V. HLUSHKOV INSTITUTE OF CYBERNETICS OF NAS OF UKRAINE 发明人 ZOLOT ANATOLII IVANOVYCH;KHODAKOVSKYI MYKOLA IVANOVYCH;MERZHVYNSKYI PAVLO ANATOLIIOVYCH
分类号 H01L21/268 主分类号 H01L21/268
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