SUBSTRATE ECHING APPARATUS,申请号KR20080130081-传众专利搜索

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发明名称	SUBSTRATE ECHING APPARATUS
摘要
申请公布号	KR101026772(B1)	申请公布日期	2011.04.11
申请号	KR20080130081	申请日期	2008.12.19
申请人		发明人
分类号	H01L21/3063;H01L21/683	主分类号	H01L21/3063
代理机构		代理人
主权项
地址

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