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发明名称
CONTRIL METHOD FOR PROBE CARD INSPECTION APPARATUS HAVING VISION INSPECTING FUNCTION
摘要
申请公布号
KR101028049(B1)
申请公布日期
2011.04.08
申请号
KR20090027677
申请日期
2009.03.31
申请人
发明人
分类号
H01L21/66;G01R1/067
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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