ACTUATOR, POSITIONING SYSTEM, AND LITHOGRAPHIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an actuator for exerting a force and a torque on an object.

SOLUTION: The actuator includes a first part that is movable with respect to a second part of the actuator in at least a first degree of freedom. The object is mounted to the first part. One of these parts is provided with a first electrical coil that is arranged to cooperate with a magnetizable portion of the other part. A controller of the actuator is configured to generate a first electrical current through the first electrical coil for generating a force between these parts. The one of these parts is provided with a second electrical coil which is arranged to cooperate with a magnetizable portion of the other part, and the controller is further configured to generate a second electrical current through the second coil and the first electrical current through the first electrical coil for exerting the force and torque between these parts. Therefore, the actuator is configured to exert the force and the torque on the object with respect to the second part.

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