| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a laminated optical circuit, by which a clad is made flat by accurately controlling the thickness of an upper layer clad when another clad is further formed on a core or the upper layer of the clad. SOLUTION: The method of manufacturing the laminated clad includes: a metallic mask-forming step 101 in which a metallic mask is formed immediately on the core formed on the clad; a clad embedding step 102 in which the core and the metallic mask are embedded in the clad; a grinding step 103 in which the clad is ground until the metallic mask is exposed and the clad is flattened; a metallic mask-removing step 104 in which the exposed metallic mask is removed; a distance measurement step 105 in which the distance of the level difference between the flattened clad and the core is measured; and a flattening step 106 in which the clad having a thickness corresponding to the distance of the level difference and the desired distance between the core and a next layer of core is formed on the flattened clad and on the core after the metallic mask is removed, and the level difference is flattened by integrally forming the clad by a heat treatment. COPYRIGHT: (C)2011,JPO&INPIT |
