| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for generating a laser beam, by which timing of a plurality of pulsed beams can be accurately and easily adjusted. SOLUTION: The method for generating a laser beam includes: a pulsed beam generating step of generating a pulsed beam; a beam splitting step of splitting the pulsed beam into a first pulsed beam and a second pulsed beam; a trigger pulse generating step of generating a trigger pulse by a trigger pulse generator 60; a timing adjusting step of adjusting the timing of the first pulsed beam and the second pulsed beam by matching the timing of generating the first pulsed beam and the timing of generating the second pulsed beam to the timing of generating the trigger pulse; and a wavelength converting step of coaxially superimposing the first pulsed beam and the second pulsed beam with adjusted timing to be incident on a wavelength conversion optical system and allowing a beam to exit, the beam having a wavelength different from those of the first pulsed beam and of the second pulsed beam. COPYRIGHT: (C)2011,JPO&INPIT |
