MASK CLEANING METHOD FOR ORGANIC EL, MASK CLEANING DEVICE FOR ORGANIC EL, MANUFACTURING DEVICE OF ORGANIC EL DISPLAY, AND ORGANIC EL DISPLAY

摘要

PROBLEM TO BE SOLVED: To obtain, when removing an organic material adhered to a mask for an organic EL by using laser beam, a high degree of cleaning without damaging the mask for the organic EL beyond restoration. SOLUTION: In a mask cleaning method for the organic EL, an organic material 51 is removed by scanning the laser beam on a surface of the mask 2 for the organic EL to which the organic material 51 is adhered. When irradiating the laser beam L on the mask 2 for the organic EL by transmission through a layer of the organic material 51, the organic material 51 is maintained in a solid state and the laser beam L by which the mask 2 for the organic EL is not deformed after irradiation is irradiated. Moreover, by irradiating the laser beam L, since thermal expansion difference is formed between the organic material 51 and the mask 2 for the organic EL, removal of the organic material 51 is carried out by acting a peeling-off force between the layers. COPYRIGHT: (C)2011,JPO&INPIT