| 摘要 |
PROBLEM TO BE SOLVED: To suppress variations of a coating shape arranged on the whole substrate, and homogenize the coating shape when forming a coated film by a wet method including a functional layer of an organic EL element on a substrate. SOLUTION: In a drying device 20, the substrate 1 into which ink is filled is placed on a support base 22 installed inside a reduced pressure vessel 21. A rectifying member 50 is arranged upward the substrate 1. A plurality of slits 53 to circulate solvent vapor are juxtaposed in the rectifying member 50. A plate like mesh member 40 is deployed at the lower face of the rectifying member 50 so as to cover inlets of respective slits 53. A plurality of through-holes 41 are opened and installed to the respective slits 53 in the mesh member 40, respectively. COPYRIGHT: (C)2011,JPO&INPIT
|
