| 摘要 |
PROBLEM TO BE SOLVED: To provide a roller driving type device for positioning a stage which automatically positions a stage to be positioned by a roller driving system. SOLUTION: The roller driving type device for positioning the stage includes: a base 1; a stage assembly 5 movable along a guide rail 2 provided for the base, including the stage 3, and including a track plate 4 integrally assembled to the stage; a feeding roller 6 contacting one surface of the track plate and having an axis along a direction orthogonal to the guide rail; a rotation driving source 7 for rotating/driving the feeding roller; and a pressure roller 8 which contacts the other surface of the track plate to sandwich the track plate by the feeding roller and itself. The stage assembly is displaced via the track plate by rotating the feeding roller. COPYRIGHT: (C)2011,JPO&INPIT
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