| 摘要 |
A manufacturing method for a micromechanical component having the following steps: at least partially covering a first side of a substrate using a first insulating layer, forming at least one actuator plate electrode, at least one contact terminal, and at least one spring component from at least one first conductive material, covering at least the at least one actuator plate electrode, the at least one contact terminal, and the at least one spring component using a second insulating layer, forming at least one stator plate electrode from at least one second conductive material, forming at least one first trench in the substrate for producing a displaceable mass and a frame of a mounting, etching being performed in a first direction, and removing at least one partial mass of the second insulating layer, which is between the at least one actuator plate electrode and the at least one stator plate electrode, etching being performed in a second direction. Also described is a related micromechanical component.
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