| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface modification apparatus which eliminates an influence of a temperature change when supplying a modifying agent compound to a vaporizing chamber, and thereby causes little concentration change of the modifying agent compound contained in a fuel gas. SOLUTION: The surface modification apparatus includes: a storage room for preserving the modifying agent compound; a vaporization section for vaporizing the modifying agent compound under a predetermined temperature condition and producing a gaseous modifying agent compound; a transfer section for introducing a carrier gas into the vaporization section and transferring the gaseous modifying agent compound to a jetting section; and the jetting section for blowing a flame originated from a fuel gas containing the modifying agent compound. The vaporization section includes a plurality of vaporizing chambers including at least the first vaporizing chamber and the second vaporizing chamber, and a switching device for alternately using the first vaporizing chamber and the second vaporizing chamber. COPYRIGHT: (C)2011,JPO&INPIT |
