CATALYTIC CVD DEVICE, METHOD FOR FORMATION OF FILM, PROCESS FOR PRODUCTION OF SOLAR CELL, AND SUBSTRATE HOLDER
摘要
In a catalytic CVD device (100), a holder (300) has a antireflective structure for the purpose of preventing the reflection of a radiant ray ejected from a catalyst wire (11) toward the side of a substrate (200).
申请公布号
WO2011040610(A1)
申请公布日期
2011.04.07
申请号
WO2010JP67285
申请日期
2010.10.01
申请人
SANYO ELECTRIC CO., LTD.;ULVAC, INC.;SHIMA, MASAKI;WAKAMIYA, YOSHINORI;OSONO, SHUJI;OKAYAMA, SATOHIRO;OGATA, HIDEYUKI
