| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer device which can irradiate ultraviolet curing resin with an ultraviolet ray having uniform intensity and can photograph a die and a substrate even if the ultraviolet curing resin is irradiated with the ultraviolet ray in a transfer device for transferring a fine transfer pattern formed in the die on the ultraviolet curing resin. SOLUTION: The transfer device 1 for transferring the fine transfer pattern formed in the die M on the ultraviolet curing resin W2 arranged on the substrate W1 is provided with a photographing device 5 photographing the die and the substrate from a prescribed position in the case of transfer, and an ultraviolet ray generator 3 installed in a position where the ultraviolet curing resin W2 is irradiated with the almost uniform ultraviolet ray although the photographing device 5 exists in the prescribed photographing position when the pattern is transferred. COPYRIGHT: (C)2011,JPO&INPIT |
