发明名称 SINTERED In-Ga-Zn-O-TYPE OXIDE
摘要 <p>A sintered oxide containing In (element indium), Ga (element gallium) and Zn (element zinc), having a total content of In, Ga and Zn of 95 at.% or more relative to the total amount of elements contained in the sintered oxide excluding element oxygen, and comprising a compound that is represented by the formula: In2O3 and has a bixbyite structure and a compound that is represented by the formula: ZnGa2O4 and has a spinel structure.</p>
申请公布号 WO2011040028(A1) 申请公布日期 2011.04.07
申请号 WO2010JP05885 申请日期 2010.09.30
申请人 IDEMITSU KOSAN CO.,LTD.;YANO, KOKI;KAWASHIMA, HIROKAZU;ITOSE, MASAYUKI;INOUE, KAZUYOSHI 发明人 YANO, KOKI;KAWASHIMA, HIROKAZU;ITOSE, MASAYUKI;INOUE, KAZUYOSHI
分类号 C04B35/00;C23C14/08;C23C14/34;H01L21/363;H01L29/786 主分类号 C04B35/00
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